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About the book/synopsis: The Microsystems technology (MST) industry has has its origins in microelectronics and has now become an important player in industry and in Research & Development. Products using MST contain embedded microsensors and microactuators, which in recent times have added considerable value to a number of industrial products, reducing unit cost and increasing functionality. Two examples are airbags and inkjet printer heads. MST uses microfabrication techniques and employs a range of expertise from specific design to customised packing and a large range of collective fabrication procedures Chapters/Contributions: 2. An Overview of Surface Micromachining 3. Bulk Micromachining and MEMS Packaging 4. Electrostatic Micro-actuators 5. The LIGA Microfabrication Technique 6. A Review of Wafer Bonding 7. Single-crystal Silicon Micro-opto-electro-mechanical Devices 8. Permanent Magnets for MAGMAS 9. RF MEMS for the Mobile Communications Era: Present and Future 10. From Microelectronics to Integrated Microsystems Testing 11. Reliability and Failure Analysis Issues in MEMS 12. CoventorWare(TM) MEMS Design Methodology |
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